Nano-positioning stage has a highly stable structure, nano-level servo control ability and software solutions to improve equipment accuracy. It shows a perfect integration of mechanics, electricity and software. It provides competitive solutions, especially for semiconductor industry.
- Nano-level positioning: This is applied in high-end precision inspection equipment. It follows the trend of industrial applications, which keep upgrading.
- Robust and stable motion control ability: It has path planning function with auto-tuning. This allows the platform to achieve outstanding dynamic performance.
- Smart manufacturing: It can easily achieve stable manufacturing through smart modules and reduce unexpected downtime loss of the production line.
- Integration of key technologies: Through the software and hardware integration, it can reduce the cost of upgrading user equipment.
±2 nm
Nano positioning stability
±0.1%
High velocity stability @100 mm/s